Hybrid bio actuator and method of manufacturing the same using 3-dimensional micro molding aligner

ABSTRACT

A hybrid bio actuator and a manufacturing method thereof using a 3-dimensional micro molding aligning apparatus are provided. The manufacturing method has the steps of: 3-dimensionally forming an actuator body with polymer using the micro molding aligning apparatus; and transplanting and cultivating the muscular cell onto the actuator body. The step of forming the actuator body comprise: preparing the upper and lower half molds corresponding to an outer contour of the actuator; installing, on the mold plate unit, the upper and lower half molds opposite to each other and placing a mass of polymer above the lower half mold; aligning the lower half mold with the upper half mold using the aligner unit; pressing the mold plate unit using the clamp unit; solidifying the polymer; and removing the solidified polymer, thereby providing the hybrid bio actuator made of a biomaterial compatible with the human body and capable of operating without a separate battery or external energy source.

CROSS-REFERENCE TO RELATED APPLICATION

This application claims all benefits of Korean Patent Application No.10-2005-126160, filed on Dec. 20, 2005 in the Korean IntellectualProperty Office, the disclosures of which is incorporated herein byreference.

BACKGROUND OF THE INVENTION

1. Field of the Invention

The present invention relates to a hybrid bio actuator and a method ofmanufacturing the same using a 3-dimensional micro molding aligner, andmore particularly to a method of manufacturing an actuator, whichprepares an actuator body made of polydimethylsiloxane (PDMS) using a3-dimensional micro molding aligner, and cultivates the muscular cellson the PDMS actuator to manufacture the actuator, and a hybrid bioactuator manufactured by the method.

2. Description of the Prior Art

A hybrid bio actuator is one of the results of the recently notednano-technology, which actuator has a very small size in micrometer unitfor general use in curing the interior of the human body.

However, since the bio actuator is very small, it is difficult tomanufacture the bio actuator. In the prior art, there was generallyprovided only one half mold so as to mold a bio actuator using the same.However, since the prior method used only one half mold, the bioactuator was constructed at only one side thereof so that it wasdifficult to mold both sides of the actuator.

Meanwhile, the metallic material of the prior actuator body may causerejection symptoms to the interior of the human body so it is improperto use. In addition, the actuator requires energy source to operate, butit is difficult for the actuator to be supplied with the energy sourcefrom exterior or to be provided with a separate battery and so on whilemaintaining very small size. Further, if the muscular cells are used asthe energy source, it is troublesome to transplant, onto the actuatorbody, the muscular cells that have been cultivated in the exterior, sothat it is true that the mass production of a bio actuator is difficult.

SUMMARY OF THE INVENTION

Accordingly, the present invention has been made to solve theabove-mentioned problems occurring in the prior art, and an object ofthe present invention is to provide a 3-dimensional micro moldingaligning apparatus capable of forming constructions on both sides of abio actuator.

Another object of the present invention is to provide a bio actuatoroperable without a separate battery or external energy source and madeof a biomaterial compatible with the interior of the human body, and amanufacturing method thereof.

In order to accomplish the above objects, there is provided a3-dimensional micro molding aligning apparatus for 3-dimensionallymolding a hybrid bio actuator body, the apparatus comprising: a basehaving thereon a plurality of support legs; a mold plate unit supportedby the support legs and having upper and lower half molds correspondingto an outer contour of the bio actuator and installed opposite to eachother; an aligner unit for aligning the lower half mold with the upperhalf mold; and a clamp unit for pressing the upper half mold of the moldplate unit toward the lower half mold.

In an another aspect of the present invention, there is provided amethod for manufacturing a hybrid bio actuator using a 3-dimensionalmicro molding aligning apparatus, the method comprising the steps of:3-dimensionally forming an actuator body with polymer using the micromolding aligning apparatus; and transplanting a muscular cell onto theactuator body to cultivate the same.

The step of forming the actuator body may comprise: preparing the upperand lower half molds corresponding to an outer contour of the actuator;installing, on the mold plate unit, the upper and lower half moldsopposite to each other and placing a mass of polymer above the lowerhalf mold; aligning the lower half mold with the upper half mold usingthe aligner unit; pressing the mold plate unit using the clamp unit;solidifying the polymer; and removing the solidified polymer.

The step of transplanting and cultivating the muscular cell maycomprise: setting the actuator body in a culture vessel; andtransplanting the muscular cell onto the actuator body in the culturevessel filled with a culture solution and cultivating the same.

Meanwhile, the hybrid bio actuator manufactured by the above methodaccording to the present invention operates on glucose as an energysource and in which one or more muscular cells are transplanted onto theactuator body so that it can operate with the contraction and relaxationof the muscular cells.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other objects, features and advantages of the presentinvention will be more apparent from the following detailed descriptiontaken in conjunction with the accompanying drawings, in which:

FIG. 1 is a perspective view of a 3-dimensional micro aligning apparatusaccording to a preferred embodiment of the present invention;

FIG. 2 is an exploded perspective view of FIG. 1;

FIG. 3 is a flow chart illustrating a process of manufacturing a hybridbio actuator according to the present invention;

FIGS. 4 to 8 are views illustrating a process of preparing a lower halfmold;

FIGS. 9 to 12 are views illustrating a process of preparing an upperhalf mold;

FIG. 13 is a schematic view of a 3-dimensional micro molding aligningapparatus which fabricates a hybrid bio actuator using the upper andlower half molds;

FIG. 14 is a front view of a bio actuator body fabricated by theapparatus of FIG. 13;

FIG. 15 is a perspective view of a cantilever type actuator;

FIG. 16 is a side view showing a movement state of the cantilever typeactuator in FIG. 15;

FIG. 17 is a perspective view of ajellyfish type actuator;

FIG. 18 is a perspective view of a moving actuator;

FIG. 19 is a side view showing a state that the moving actuator in FIG.18 is inclined to a bottom;

FIG. 20 is a side view showing a movement state of the moving actuatorin FIG. 18;

FIG. 21 is a perspective view of a moving actuator having a plurality ofcantilevers;

FIG. 22 is a side view showing a state that the moving actuator in FIG.21 is curved to a bottom; and

FIG. 23 is a side view showing a movement state of the moving actuatorin FIG. 21.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Hereinafter, preferred embodiments of the present invention will bedescribed with reference to the accompanying drawings. A 3-dimensionalmicro molding aligning apparatus for manufacturing a bio actuator willbe first explained, and a manufacturing method of the bio actuator usingthe apparatus and the bio actuator manufactured by the method will beexplained in series.

FIG. 1 is a perspective view of a 3-dimensional micro aligning apparatusaccording to a preferred embodiment of the present invention, and FIG. 2is an exploded perspective view of FIG. 1.

Referring to FIGS. 1 and 2, the 3-dimensional micro molding aligningapparatus 100 includes a base 10 on which various constituent elementsto be explained later are installed. The base 10 has a plurality ofsupport legs 12 extending vertically therefrom. Preferably, four supportlegs 12, as shown in FIGS. 1 and 2, are installed on the corner portionsof the base 10 to firmly support a following mold plate unit 20.

The mold plate unit 20 is fixed to the distal ends of the support legs12. Upper and lower half molds (80 and 70 in FIG. 13) corresponding toan outer contour of a bio actuator are installed opposite to each otheron the mold plate unit 20. Specifically, the mold plate unit 20 includesa lower mold plate 21 fixedly supported by the support legs 12, a middlemold plate 25 movably positioned above the lower mold plate 21, and anupper mold plate 28 positioned above the middle mold plate 25.

The lower mold plate 21 enables the middle mold plate 25 to move alongthe upper portion thereof, and serves to support the whole of the moldplate unit 20. The lower mold plate 21 has a center through-hole 23,through which an aligner unit 40 to be explained later is connected withthe middle mold plate 25. The through-hole 23 has a proper size,preferably, smaller than the middle mold plate 25 such that the middlemold plate 25 above the lower mold plate 21 does not pass through thethrough-hole.

The middle mold plate 25 is movably positioned above the lower moldplate 21, as described above. A mold fixture portion 26 is provided onthe upper portion of the middle mold plate 25 to fix the lower half mold70. Since the lower half mold 70 is detachably fixed to the fixtureportion 26, an operator fixes various lower half molds 70 to the fixtureportion 26, thereby forming a shape of a bio actuator desired tofabricate.

The upper mold plate 28 is positioned above the middle mold plate 25,and as is not shown in the drawings, a fixture portion is provided atthe center portion of under surface of the upper mold plate so as to fixthe upper half mold thereto. Like the lower half mold 70, the upper halfmold 80 is detachably fixed to the fixture portion of the upper moldplate 28. Accordingly, the upper and lower half molds 80 and 70 of theupper and lower mold plates 28 and 25, respectively, are installedopposite to each other.

Meanwhile, a plurality of through-holes 29 is formed near the edges ofthe upper mold plate 28, and through-holes 22 are also formed atpositions of the lower mold plate 21 corresponding to the formerthrough-holes. The upper and lower mold plates 28 and 21 are fixed bypins 32 passing through both the through-holes 29 and 22 so that theycannot move horizontally, but move vertically. That is, the upper moldplate 28 cannot move horizontally to the lower mold plate 21 due to thepins 32, but it can move vertically along the pins 32. Such constructionmakes it possible for the upper mold plate 28 to move vertically towardthe lower mold plate 21 along the pins 32 when it is pressed by a clampunit 40 to be explained later.

In a preferred embodiment, one or more viewing windows 30 are providedat proper position of the upper mold plate 28, and the upper half mold80 fixed under the upper mold plate 28 is made of glass. Thus, anoperator can observe the upper and lower half molds 80 and 70 throughthe viewing window 30 using a microscope 34 (See FIG. 13) so as to checkan aligned state of the upper and lower half molds 80 and 70.

The aligner unit 40 is positioned on the base 10 so as to slightly moveand align the lower half mold 70 relative to the upper half mold 80.Particularly, the aligner unit 40 includes a connection member 42connected with the middle mold plate 25 through the through-hole 23 ofthe lower mold plate 21 to interwork therewith, an X-directional aligner44 for moving the connection member 42 in X-direction, a Y-directionalaligner 46 for moving the connection member 42 in Y-direction, and arotary aligner 48 for rotating the connection member 42 about an Z-axis.

The connection member 42 of the aligner unit 40 can take X andY-direction straight line motions by the X and Y-directional aligners 44and 46, and a Z-direction rotational motion by the rotary aligner 48.Accordingly, an operator can align the upper and lower half molds 80 and70 with each other through moving the connection member 42 of thealigner unit 40 after he observes the aligning state of the half moldsthrough the viewing window 30 of the upper mold plate 28, using themicroscope 34. In this way, the connection member 42 can slightly moveand control the middle mold plate 25 interconnected with the connectionmember 42 and the lower half mold 70 fixed to the fixture portion 26 ofthe middle mold plate 25. Thus, an operator slightly moves and controlsthe lower half mold 70 fixed to the middle mold plate 25 using thealigner unit 40 to thus align the same with the upper half mold 80.

In a preferred embodiment, it is employed M433, M423 or M481-A ofNewport Company as the aligner unit 40. The aligner units have beendeveloped and known in the art, so the detailed explanation thereof willbe omitted.

The clamp unit 60 is selectively fixed to the upper portion of the moldplate unit 20 so as to press the upper mold plate 28 toward the middleand lower mold plates 25 and 21, thereby pressing the upper half mold 80toward the lower half mold 70.

Particularly, the clamp unit 60 includes a body portion 62 in length.The body portion 62 preferably has a length corresponding to the moldplate unit 20 so as to be easily fixed thereto.

Pivot legs 64 are pivotably connected to both ends of the body portion62. The pivot leg 64 has at its distal end an extension 66 extendingvertically. When the pivot legs 64 are positioned vertically to the bodyportion 62 and a pressing bolt 68 presses the upper mold plate 28, theextension 66 becomes to be positioned under the mold plate unit 20,i.e., the lower mold plate 21, to support the mold plate unit 20.

The pressing bolt 68 presses the upper mold plate 28 toward the middleand lower mold plates 25 and 21, passing through the body portion 62,thereby implementing the molding in which the upper half mold 80 of theupper mold plate 28 is pressed toward the lower half mold 70 of themiddle mold plate 25.

Meanwhile, an anti-deformation member 69 is provided near the end of thepressing bolt 68 where the pressing bolt brings into contact with theupper mold plate 28. Upon pressing of the pressing bolt 68, theanti-deformation member 69 prevents the pressing bolt 68 from directlycontacting the upper mold plate 28 to cause a deformation. Theanti-deformation member 69 may be used in many forms, such as a bearingas shown in FIG. 2.

FIG. 3 is a flow chart of a method of manufacturing a bio actuatoraccording to the present invention. Hereinafter, a method ofmanufacturing a bio actuator using the above-mentioned 3-dimensionalmicro molding aligning apparatus 100 will be described.

As shown in FIG. 3, the manufacturing method for bio actuator includesthe main steps of preparing an actuator body with polydimethylsiloxane(PDMS) (S100), and transplanting and cultivating a muscular cell ontothe actuator body (S200).

The bio actuator is manufactured in a very small size for general use inoperating in the interior of the human body, so that the actuator bodyis generally made of harmless PDMS that does not cause a rejection tothe organs in the human body. The muscular cell (e.g., myocardial cell)is cultivated after it is transplanted onto the actuator, which isbecause the method of the present invention can selectively transplantthe muscular cell onto only the bio actuator.

Particularly, the step S100 includes: preparing the upper and lower halfmolds 80 and 70 (FIG. 13) corresponding to an outer contour of theactuator (S110); installing the prepared upper and lower half molds 80and 70 opposite to each other on the mold plate unit 20 (FIG. 2) andapplying PDMS 2 (FIG. 13) on the lower half mold 70 (S120); aligning thelower half mold 70 with the upper half mold 80 using the aligner unit 40(FIG. 2) (S130); pressing with the clamp unit 60 (FIG. 2) (S140);solidifying the PDMS actuator body (S150); removing the solidifiedactuator body from the molds (S160); and coating the solidified actuatorbody with fibronectin (S170)

The process of the manufacturing method of the bio actuator will now beexplained in detail.

First, an operator fabricates the upper and lower half moldscorresponding to an outer contour of the bio actuator (S120). FIGS. 4 to8 show the steps of fabricating the lower half mold 70, and FIGS.9 to 12show the steps of fabricating the upper half mold 80.

Referring to FIGS. 4 to 8, an operator applies photoresist 74 (e.g.,negative photoresist) on a silicon wafer 72 using a spin coater, andpre-bakes it under certain condition of temperature/time (e.g., at 90°C. for 15 min) (See FIG. 4). A photo mask 76 in which channels aredesigned is placed on the silicon wafer 72 applied with photoresist 74,and an exposure process is implemented thereto for predetermined time(e.g., 20 to 180 sec) (See FIG. 5). The silicon wafer 72 is immersedinto a developing solution (e.g., SU-8 solvent) for predetermined time(e.g., 5 min) to develop, and is post-baked under certain condition oftemperature/time (e.g., at 90° C. for 15 min) to form the lower halfmold 70. If the lower half mold 70 has more complicated construction, itcan be formed by repeating the above processes. That is, the resultantsilicon wafer 72 is further applied with photoresist 74′ to pre-bake(See FIG. 6), a photo mask 76′ in which different channels from thephoto mask 76 are designed is placed on the former silicon wafer toexpose the same to ultraviolet ray for certain time (See FIG. 7), andthe resultant silicon wafer is immersed into a developing solution todevelop and post-baked to form a lower half mold. FIG. 8 shows the lowerhalf mold 70 fabricated by repeating the above process. Referring toFIG. 8, it can be seen that more complicated lower half mold is formedthrough the above process.

Referring to FIGS. 9 to 12, an operator applies photoresist 86 on bothsides of a glass plate 82 coated with Cr/Au 84, and pre-bakes it (FIG.9). A photo mask 86 in which channels are designed is placed on theapplied photoresist 86, an exposure process is implemented thereto forpredetermined time (See FIG. 10), and the glass plate is etched (FIG.11) to form the upper half mold 80 of glass plate. FIG. 12 shows theupper half mold 80 fabricated by the process.

After being prepared, the upper and lower half molds 80 and 70 areinstalled opposite to each other on the mold plate unit 28 (FIG. 2) ofthe micro molding aligning apparatus 100 (FIG. 2). Specifically, theupper half mold 80 is installed on the fixture portion (not shown)formed under the upper mold plate 28 (FIG. 2), and the lower half mold70 on the fixture portion 26 formed on the middle mold plate 25 (FIG.2). The middle mold plate 25 is positioned above the lower mold plate21, and the upper and lower mold plates 28 and 21 are fixed using thepins 32. FIG. 13 schematically shows the aligning apparatus 100 with theupper and lower half molds 80 and 70 installed thereon opposite to eachother. After the upper and lower half molds 80 and 70 are arranged,polymer composing the actuator body, preferably, PDMS 2 (FIG. 13), ispositioned on the lower half mold 70 (S120).

Then, an operator slightly moves and aligns the lower half mold 70 usingthe aligner unit 40 connected to the mold plate unit 20 (S130).Particularly, as shown in FIG. 13, the operator observes an alignedstate of the upper and lower half molds 80 and 70 through the viewingwindow 30 of the upper mold plate 28, using the microscope 34. In thepreferred embodiment, the upper half mold 80 is made of glass so thatthe operator can observe the aligned state of the upper and lower halfmolds 80 and 70 through the viewing window 30. If the upper and lowerhalf molds are aligned off, the operator controls the aligner unit 40connected with the middle mold plate 25 through the hole 23 of the lowermold plate 21 to slightly move the middle mold plate 25 to control thealigned state. That is, the operator can rearrange the aligned state ofthe lower half mold 70 by moving the middle mold plate 25 in X or Ydirection, or rotating it about Z-axis, using the X, Y-directional, orrotary aligner 44, 46, or 48 (FIG. 2) of the aligner unit 40 (FIG. 2).

After the rearrangement in the aligned state of the upper and lower halfmolds 80 and 70 using the aligner unit 40, the operator presses the moldplate unit 20 using the clamp unit 60 (FIG. 2) (S140). The operatorpositions the body portion 62 (FIG. 2) of the clamp unit 60 above theupper mold plate 28, and rotates the pivot legs 64 pivotably connectedto both ends of the body portion 62 vertically to the body portion 62.Then, the extension 66 extending vertically to the end of the pivot leg64 becomes to naturally support the lower portion of the lower moldplate 21. The operator rotates the pressing bolt 68 passing through thebody portion 62 to press the upper mold plate 28, which in turn becomesclose contact with the middle mold plate 25 while moving verticallyalong the pin 32. Upon pressing by the pressing bolt 68, theanti-deformation member 69 such as bearing is connected to the end ofthe pressing bolt 68 in order to prevent the deformation of the uppermold plate 28.

As the upper mold plate 28 becomes close contact with the middle moldplate 25, the upper half mold 80 fixed to the upper mold plate 28becomes close contact with the lower half mold 70 fixed to the middlemold plate 25. Accordingly, as shown in FIG. 13, PDMS 2 applied onto thelower half mold can be molded in a desired shape by the upper and lowerhalf molds 80 and 70.

After pressing with the camp unit 60, the operator removes the moldplate unit 20 from the support legs 12 of the base 10, and puts the moldplate unit 20 inn an oven (not shown) to solidify the same under certaincondition of temperature (e.g., 120° C.)/time (e.g., 2 hours) (S150).

Then, the solidified actuator body is removed from the lower half mold70, i.e., the silicon wafer(S160). In this case, before the applicationof PDMS to the lower half mold 70 composed of silicon wafer, if atridecafluoro-1,1,2,2-tetrahydrooctyl-1-trichlorosilane solution ispre-coated onto the lower half mold 70, i.e., silicon wafer, to formsilane group, or otherwise, C₄F₈ in plasma is coated onto the siliconwafer using a deep RIE, the PDMS actuator body can be easily removedfrom the lower half mold 70.

The solidified PDMS composes the bio actuator body. Further, fibronectinis coated onto a portion of the bio actuator body to improve theadhesion of the muscular cell to be transplanted. Various methods ofcoating fibronectin may be employed, such as a method in which OH groupis formed on the PDMS bio actuator body using O₂ plasma, and fibronectinis then coated thereon. FIG. 14 shows an embodiment of the bio actuatorbody 1 manufactured by the above molding process. It can be seen thatthe bio actuator body 1 of FIG. 14 corresponds to the outer contour ofthe upper and lower half molds 80 and 70 as shown in FIG. 13. Thepresent invention can manufacture the 3-dimensional bio actuator body inwhich constructions are formed on both upper and lower portions thereof

Meanwhile, now described is the step S200 of transplanting andcultivating the muscular cell onto the actuator body removed from thelower half mold composed of the silicon wafer. The step S200 comprises:forming a substrate in the culture vessel using PDMS (S220); positioningthe PDMS removed from the silicon wafer, i.e., the actuator body, on thePDMS substrate (S240); transplanting the muscular cell onto the actuatorbody (S260); and cultivating and cleaning the muscular cell (S280).

In case of cultivating the muscular cell while placing only the actuatorbody made of PDMS in the culture vessel, the muscular cell istransplanted onto both the actuator body and the culture vessel, so thatit may be difficult to transplant the muscular cell onto only desiredportion of the actuator body. To solve this problem, i.e., to transplantthe muscular cell onto only desired portion of the actuator body, PDMSis applied in thickness to the culture vessel to form a PDMS substrate,and the PDMS actuator body coated with fibronectin of the presentinvention is positioned on the PDMS substrate (S240). The muscular cellhas a tendency not to be easily transplanted onto PDMS itself not coatedwith a cell body material such as fibronectin.

Then, the culture vessel in which the PDMS substrate and the actuatorbody are positioned is filled with a culture solution containingglucose, and a desired muscular cell is introduced into the culturevessel, thereby transplanting the muscular cell onto the actuator body(S260). In this case, since the portion of the actuator body desired totransplant the muscular cell is coated with fibronectin for improvementin a binding force, the muscular cell is transplanted onto only theportion coated with fibronectin.

After the transplantation of the muscular cell onto the actuator body,the muscular cell is cultivated and cleaned (S280). In the course ofcultivation, the muscular cell is cultivated on glucose as an energysource in the culture solution. After the cultivation of the muscularcell, the PDMS substrate and the actuator body are cleaned using Hanks'balanced salt solution (HBSS) so that the muscular cell can be bound toonly the portion of the actuator body on which collagen is coated.

FIGS. 15 to 20 are views illustrating embodiments of the bio actuatormanufactured by the above process.

FIG. 15 shows a cantilever type actuator. In FIG. 15, the cantilevertype actuator is formed with a cantilever 200, on which one or moremuscular cells are transplanted and cultivated. The cantilever 200transplanted with the muscular cells moves in an arrow direction, asshown in FIG. 16, by contraction or relaxation of the muscular cell 210.The cantilever 200 can be used in both performance evaluation of a bioactuator and physical and physiological analysis of a myocardial cellfor clinical treatment

FIG. 17 shows a jellyfish type actuator. In FIG. 17, the jellyfish typeactuator 300 of this embodiment includes a center body 310, and aplurality of wings 320 radially extending from the body 310. The wing320 has at its upper portion a longitudinal groove 322 in which themuscular cell (not shown) is transplanted to cultivate. Then, when themuscular cell trnsplanted in the groove 322 of the wing 320 iscontracted or relaxed, the wing rotates up and down in the drawing. Suchrotation of the wing 320 makes it possible for the jellyfish typeactuator 300 to move to a desired position, flowing in a blood vessel ofthe human body.

FIG. 18 shows a moving actuator 400 different from the aboveembodiments.

Referring to FIG. 18, the actuator of this embodiment includes a body410 having an under groove 412, and four legs 420 and 440 extendingunder the body 410. Herein, the four legs 420 and 440 have differentlength by one pair. The pair of legs 420 vertically to the groove 412under the body 410 has a longer length than the other pair of legs 440.The difference between lengths is a source of moving the actuator, andis described later in detail. The muscular cell is transplanted onto theunder groove 412 of the body 410.

FIGS. 19 and 20 are schematic views illustrating a movement state of themoving actuator 400 of FIG. 18. In FIG. 19, the moving actuator 400becomes to be in a state that the body 410 is inclined to the bottom dueto the length difference. In this state, when the muscular celltrasplanted under the body 410 repeats contraction or relaxation, asshown in FIG. 20, the body 410 is twisted in an arrow direction so thatbending or unbending thereof are repeated. As the body 410 is repeatedlybent and unbent, the legs 440 of the body advance on the bottom to thusadvance the actuator 400.

FIG. 21 shows a moving actuator 500 comprising a plurality of thecantilevers in FIG. 15.

Referring to FIG. 21, the actuator of this embodiment includes arectangular body 510, and a plurality of cantilevers 520 and 530extending from both sides of the body 510. Herein, the cantilevers 520and 530 have different length. The right-side cantilevers 520 in FIG. 21have a longer length than the left-side cantilevers 530. The differencebetween cantilevers is a source of moving the actuator, and is describedlater in detail. The muscular cell is transplanted onto the bottom ofthe body 510 and the cantilevers 520 and 530.

FIGS. 22 and 23 are schematic views illustrating a movement state of themoving actuator 500 of FIG. 21. In FIG. 22, the moving actuator 500becomes to be in a state that the body 510 and the cantilevers 520 and530 are curved to the bottom. In this state, when the muscular celltrnsplanted under the body 510 and the cantilevers 520 and 530 repeatscontraction or relaxation, as shown in FIG. 23, the body 510 and thecantilevers 520 and 530 are twisted in an arrow direction so thatbending or unbending thereof are repeated. As the body 510 andcantilevers 520 and 530 are repeatedly bent and unbent, the cantilevers520 and 530 of the body 510 advance on the bottom to thus advance theactuator 500.

The bio actuator manufactured by the above process can be made invarious forms according to a purpose desired to use, and does notrequire a separate external energy source because it operates on glucoseafter introduced into the human body.

In addition, the muscular cell used in the bio actuator may be one ormore.

In addition, since the molding aligning apparatus of the presentinvention can implement a molding process for 3-dimensional shapemember, a micro-fluidic product such as a micro mixer, a micro valve, ora micro pump can be manufactured by the present invention.

In addition, the molding aligning apparatus of the present invention canimplement an align process in wafer unit so that it can be used inglass-to-glass thermal bonding or epoxy based wafer unit bonding as wellas molding apparatus.

According to a 3-dimensional micro molding aligning apparatus of thepresent invention, an actuator is molded using upper and lower halfmolds to thus easily manufacture a complicated shaped actuator.

In addition, according to a 3-dimensional micro molding aligningapparatus of the present invention, a lower half mold can be controlledin alignment with an upper half mold by moving it in X or Y direction,or rotating it about an Z-axis, using an aligner unit, to thusmanufacture a precise actuator.

According to a bio actuator and a manufacturing method thereof of thepresent invention, an actuator is manufactured using a harmless materialcompatible with the human body so that it can be introduced into thehuman body without a rejection and be used for the purpose of treatmentsuch as removal of cancer cells, and that it does not require a separateexternal energy source because the actuator operates on glucose in thehuman body, thereby manufacturing a compact actuator.

In addition, a muscular cell can be cultivated in a bio actuator body,and selectively bound and effectively removed using a collagen and acleaning solution, so that it is possible to achieve mass production.

Although preferred embodiments of the present invention have beendescribed for illustrative purposes, those skilled in the art willappreciate that various modifications, additions and substitutions arepossible, without departing from the scope and spirit of the inventionas disclosed in the accompanying claims.

1. A 3-dimensional micro molding aligning apparatus for 3-dimensionallymolding a bio actuator body, the apparatus comprising: a base havingthereon a plurality of support legs; a mold plate unit supported by thesupport legs and having upper and lower half molds corresponding to anouter contour of the bio actuator and installed opposite to each other;an aligner unit positioned on the base and aligning the lower half moldwith the upper half mold; and a clamp unit selectively fixed to theupper portion of the mold plate unit and pressing the upper half mold ofthe mold plate unit toward the lower half mold.
 2. The apparatus asclaimed in claim 1, wherein the mold plate unit comprises: a lower moldplate supported by the plurality of support legs installed on the baseand having a center through-hole; a middle mold plate movably positionedabove the lower mold plate and having thereon a fixture portion forfixing the lower half mold; and an upper mold plate positioned above themiddle mold plate and having at its under surface a fixture portion forfixing the upper half mold.
 3. The apparatus as claimed in claim 2,wherein the aligner unit comprises: a connection member connected withthe middle mold plate through the through-hole of the lower mold plateto interwork therewith; a X-directional aligner for moving theconnection member in X-direction; a Y-directional aligner for moving theconnection member in Y-direction; and a rotary aligner for rotating theconnection member about an Z-axis, whereby the lower half mold isaligned with the upper half mold.
 4. The apparatus as claimed in claim3, wherein the upper mold plate has one or more viewing windows, and theupper half mold is made of glass, whereby the aligned state of the upperand lower half molds is observed through the viewing windows.
 5. Theapparatus as claimed in claim 2, wherein the clamp unit comprises: abody portion in length; a pair of pivot legs installed on both ends ofthe body portion and having extensions extending vertically from thedistal end thereof for supporting the mold plate unit; and a pressingbolt for pressing the upper mold plate toward the middle and lower moldplates while passing through the body portion, thereby pressing theupper half mold toward the lower half mold.
 6. The apparatus as claimedin claim 5, wherein an anti-deformation member is installed at an end ofthe pressing bolt to be brought into contact with the upper mold plateso as to prevent the deformation of the upper mold plate when the uppermold plate is pressed with the pressing bolt.
 7. A methods formanufacturing a bio actuator transplanted with a muscular cell, themethod comprising the steps of: 3-dimensionally forming an actuator bodywith polymer using the micro molding aligning apparatus as claimed inclaim 1; and transplanting and cultivating the muscular cell onto theactuator body.
 8. The methods as claimed in claim 7, wherein the step offorming the actuator body comprises: preparing the upper and lower halfmolds corresponding to an outer contour of the actuator; installing, onthe mold plate unit, the upper and lower half molds opposite to eachother and placing a mass of polymer above the lower half mold; aligningthe lower half mold with the upper half mold using the aligner unit;pressing the mold plate unit using the clamp unit; solidifying thepolymer; and removing the solidified polymer.
 9. The methods as claimedin claim 8, wherein the polymer is polydimethylsiloxane (PDMS).
 10. Themethods as claimed in claim 8, wherein the step of forming the actuatorbody further comprises coating onto the polymer fibronectin compatiblewith the muscular cell and having a great binding force for the polymer.11. The methods as claimed in claim 8, wherein the lower half mold iscomposed of a silicon wafer, and a release accelerant solution is coatedonto the lower half mold to form silane group, or C₄F₈ is coated inplasma onto the silicon wafer using deep RIE for the actuator body to beeasily removed from the lower half mold.
 12. The methods as claimed inclaim 11, wherein the release accelerant solution istridecafluro-,1,2,2-tetrahydrooctyl-1-trichlorosilane.
 13. The methodsas claimed in claim 10, wherein the fibronectin is coated onto thepolymer after OH group is formed using O₂ plasma.
 14. The methods asclaimed in claim 7, wherein the step of transplanting and cultivatingthe muscular cell on the actuator body is implemented withouttransplanting the externally cultivated muscular cell onto the actuatorbody so that the muscular cell is transplanted onto the actuator body ina state that the actuator body is immersed into a culture solution, andthe actuator body is operated in the culture solution.
 15. The methodsas claimed in claim 14, wherein the culture solution contains glucose.16. The methods as claimed in claim 7, wherein the step of transplantingand cultivating the muscular cell comprises: setting the actuator bodyin a culture vessel; and transplanting the muscular cell onto theactuator body in the culture vessel filled with a culture solution andcultivating the same.
 17. The methods as claimed in claim 16, whereinthe culture solution contains glucose.
 18. The methods as claimed inclaim 16, wherein the step of setting the actuator body in the culturevessel comprises: applying to the culture vessel a polymer in thicknesshaving a small binding force for the muscular cell, to form a polymersubstrate; and positioning the actuator body above the polymersubstrate.
 19. The methods as claimed in claim 18, wherein the polymeris PDMS.
 20. The methods as claimed in claim 16, wherein the step oftransplanting and cultivating the muscular cell is implemented such thatthe muscular cell optionally introduced into the culture vessel is boundto the actuator body coated with the fibronectin compatible with themuscular cell.
 21. The methods as claimed in claim 20, wherein the stepof transplanting and cultivating the muscular cell is implemented suchthat after the cultivation of the muscular cell, the actuator body andthe polymer substrate are cleaned using a Hanks' balanced salt solution(HBSS) to remove the muscular cell from the polymer substrate.
 22. A bioactuator manufactured by the methods as claimed in claim 7, wherein theactuator operates on glucose as an energy source, and wherein a muscularcell is transplanted onto an actuator body and is cultivated so that theactuator operates with the contraction or relaxation of the muscularcell.
 23. A bio actuator manufactured by the methods as claimed in claim7, wherein the actuator operates on glucose as an energy source, andwherein a plurality of muscular cells is trasplanted onto an actuatorbody and is cultivated so that the actuator operates with thecontraction or relaxation of the muscular cells.
 24. The bio actuator asclaimed in claim 22, wherein the bio actuator comprises a cantilever onwhich the muscular cell is transplanted and cultivated so that thecantilever moves up or down by the contraction or relaxation of themuscular cell.
 25. The bio actuator as claimed in claim 22, wherein thebio actuator comprises: a body portion; and a plurality of wingsradially extending from the body portion and having thereon longitudinalgrooves, wherein the muscular cell is transplanted and cultivated in thegrooves so that the wings move up or down by the contraction orrelaxation of the muscular cell.
 26. The bio actuator as claimed inclaim 22, wherein the bio actuator comprises: a body portion having aplurality of grooves under the lower surface thereof; and four legsextending under the body portion, wherein one pair of legs vertically toa length of the groove is longer than the other pair of legs, and themuscular cell is transplanted and cultivated in the grooves so that theactuator moves by twisting movement of the body portion due to thecontraction or relaxation of the muscular cell.
 27. The bio actuator asclaimed in claim 22, wherein the bio actuator comprises: a rectangularbody portion; and a plurality of cantilevers extending from the bothsides of the body portion, wherein the one-side cantilevers of the bodyportion are longer than the other-side cantilevers of the body portion,and the muscular cell is transplanted and cultivated in the bottom ofthe body portion and cantilevers so that the actuator moves by twistingmovement of the body portion and cantilevers due to the contraction orrelaxation of the muscular cell.
 28. The bio actuator as claimed inclaim 23, the bio actuator comprises a cantilever on which the muscularcells are transplanted and cultivated so that the cantilever moves up ordown by the contraction or relaxation of the muscular cells.
 29. The bioactuator as claimed in claim 23, wherein the bio actuator comprises: abody portion; and a plurality of wings radially extending from the bodyportion and having thereon longitudinal grooves, wherein the muscularcells are transplanted and cultivated in the grooves so that the wingsmove up or down by the contraction or relaxation of the muscular cells.30. The bio actuator as claimed in claim 23, wherein the bio actuatorcomprises: a body portion having a plurality of grooves under the lowersurface thereof; and four legs extending under the body portion, whereinone pair of legs vertically to a length of the groove is longer than theother pair of legs, and the muscular cells are transplanted andcultivated in the grooves so that the actuator moves by twistingmovement of the body portion due to the contraction or relaxation of themuscular cells.
 31. The bio actuator as claimed in claim 23, wherein thebio actuator comprises: a rectangular body portion; and a plurality ofcantilevers extending from the both sides of the body portion, whereinthe one-side cantilevers of the body portion are longer than theother-side cantilevers of the body portion, and the muscular cell istransplanted and cultivated in the bottom of the body portion andcantilevers so that the actuator moves by twisting movement of the bodyportion and cantilevers due to the contraction or relaxation of themuscular cell.